An analytical model of multi-component radio frequency capacitively coupled plasma and experimental validation

Simple item page
dc.contributor.authorVeloso Espinosa, Felipe Eduardo
dc.contributor.authorWyndham, E.
dc.contributor.authorFavre Domínguez, Mario
dc.contributor.authorBhuyan, Heman
dc.contributor.authorSaikia, P.
dc.date.accessioned2020-07-23T15:51:30Z
dc.date.available2020-07-23T15:51:30Z
dc.date.issued2017
dc.fuente.origenConveris
dc.identifier.doi10.1063/1.4973233
dc.identifier.issn1070-664X
dc.identifier.issn1089-7674
dc.identifier.urihttps://doi.org/10.1063/1.4973233
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/37039
dc.issue.numeroNo. 1
dc.language.isoen
dc.nota.accesoContenido parcial
dc.revistaPhysics of Plasmases_ES
dc.rightsacceso restringido
dc.subject.ddc510
dc.subject.deweyMatemática física y químicaes_ES
dc.subject.otherDinámica de fluidoses_ES
dc.subject.otherPlasmaes_ES
dc.subject.otherCorrientes eléctricases_ES
dc.titleAn analytical model of multi-component radio frequency capacitively coupled plasma and experimental validationes_ES
dc.typeartículo
dc.volumenVol. 24
sipa.codpersvinculados14943
sipa.codpersvinculados1003913
sipa.codpersvinculados99732
sipa.codpersvinculados99732
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
An analytical model of multi-component radio frequency capacitively coupled plasma and experimental validation.pdf
Size:
55.56 KB
Format:
Adobe Portable Document Format
Description:
Abstract
Download
Collections
Artículos de revistas