Diagnostic of capacitively coupled radio frequency plasma by homogeneous discharge model

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dc.contributor.authorBora, Bijit
dc.contributor.authorBhuyan, Heman
dc.contributor.authorFavre Domínguez, Mario
dc.contributor.authorWyndham, Edmund
dc.contributor.authorBora, Bijit
dc.contributor.authorBhuyan, Heman
dc.contributor.authorFavre Domínguez, Mario
dc.contributor.authorWyndham, Edmund
dc.date.accessioned10-05-2016 15:16
dc.date.available10-05-2016 15:16
dc.date.issued2012
dc.identifier.issn0375-9601
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/13912
dc.language.isoen
dc.nota.accesoContenido parcial
dc.relation.isformatofPhysics Letters A No. 16 (376), p. 1356-1359.
dc.revistaPhysics Letters a
dc.subject.ddc510
dc.subject.deweyMatemática física y química
dc.subject.otherPlasma (Gases ionizados)
dc.subject.otherPresión atmosférica
dc.titleDiagnostic of capacitively coupled radio frequency plasma by homogeneous discharge model
dc.typeartículo
sipa.codpersvinculados1011568
sipa.codpersvinculados1003913
sipa.codpersvinculados99732
sipa.codpersvinculados100407
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