The electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma : a study by a nonlinear global model

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dc.contributor.authorSaikia, P.
dc.contributor.authorBhuyan, Heman
dc.contributor.authorEscalona Álvarez, Miguel Benito
dc.contributor.authorFavre Domínguez, Mario
dc.contributor.authorBora, Bijit
dc.contributor.authorKakati, M.
dc.contributor.authorWyndham, Edmund
dc.contributor.authorRawat, R.
dc.contributor.authorSchulze, J.
dc.date.accessioned2020-09-01T21:26:16Z
dc.date.available2020-09-01T21:26:16Z
dc.date.issued2018
dc.format.extent9 páginas
dc.fuente.origenConveris
dc.identifier.doi10.1063/1.5023884
dc.identifier.issn0021-8979
dc.identifier.urihttps://doi.org/10.1063/1.5023884
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/43319
dc.issue.numeroNo. 18
dc.language.isoen
dc.nota.accesoContenido parcial
dc.pagina.final183303-9
dc.pagina.inicio183303-1
dc.revistaJournal of Applied Physicses_ES
dc.rightsacceso restringido
dc.subject.ddc510
dc.subject.deweyMatemática física y químicaes_ES
dc.subject.otherDinámica del plasmaes_ES
dc.subject.otherSimetría (Física)es_ES
dc.subject.otherElectroforesises_ES
dc.titleThe electrical asymmetry effect in a multi frequency geometrically asymmetric capacitively coupled plasma : a study by a nonlinear global modeles_ES
dc.typeartículo
dc.volumenVol. 123
sipa.codpersvinculados1003913
sipa.codpersvinculados1039778
sipa.codpersvinculados99732
sipa.codpersvinculados100407
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