Study of dual radio frequency capacitively coupled plasma: an analytical treatment matched to an experiment

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dc.contributor.authorSaikia, P.
dc.contributor.authorBhuyan, Heman
dc.contributor.authorEscalona Álvarez, Miguel Benito
dc.contributor.authorFavre Domínguez, Mario
dc.contributor.authorWyndham, Edmund
dc.contributor.authorMaze Ríos, Jerónimo
dc.contributor.authorSchulze, J.
dc.date.accessioned2020-11-25T17:36:54Z
dc.date.available2020-11-25T17:36:54Z
dc.date.issued2018
dc.format.extent9 páginas
dc.fuente.origenConveris
dc.identifier.doi10.1088/1361-6595/aaa565
dc.identifier.issn0963-0252
dc.identifier.issn1361-6595
dc.identifier.urihttps://doi.org/10.1088/1361-6595/aaa565
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/49162
dc.issue.numeroNo. 1
dc.language.isoen
dc.pagina.final9
dc.pagina.inicio1
dc.revistaPlasma Sources Science and Technologyes_ES
dc.titleStudy of dual radio frequency capacitively coupled plasma: an analytical treatment matched to an experimentes_ES
dc.typeartículo
dc.volumenVol. 27
sipa.codpersvinculados1003913
sipa.codpersvinculados1039778
sipa.codpersvinculados99732
sipa.codpersvinculados100407
sipa.codpersvinculados10674
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