Effect of hydrogen addition on the deposition of titanium nitride thin films in nitrogen added argon magnetron plasma

Simple item page
dc.contributor.authorSaikia, P.
dc.contributor.authorBhuyan, Heman
dc.contributor.authorDíaz Droguett, Donovan Enrique
dc.contributor.authorGuzman, F.
dc.contributor.authorMändl, S.
dc.contributor.authorSaikia, B. K.
dc.contributor.authorFavre Domínguez, Mario
dc.contributor.authorMaze Ríos, Jerónimo
dc.contributor.authorWyndham, E.
dc.date.accessioned2021-05-13T17:51:42Z
dc.date.available2021-05-13T17:51:42Z
dc.date.issued2016
dc.format.extent10 páginas
dc.fuente.origenConveris
dc.identifier.doi10.1088/0022-3727/49/22/225203
dc.identifier.eissn1361-6463
dc.identifier.issn0022-3727
dc.identifier.urihttps://doi.org/10.1088/0022-3727/49/22/225203
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/58386
dc.issue.numeroNo. 22
dc.language.isoen
dc.nota.accesoContenido parcial
dc.pagina.final225212
dc.pagina.inicio225203
dc.revistaJournal of Physics D: Applied Physicses_ES
dc.rightsacceso restringido
dc.titleEffect of hydrogen addition on the deposition of titanium nitride thin films in nitrogen added argon magnetron plasmaes_ES
dc.typeartículo
dc.volumenVol. 49
sipa.codpersvinculados1003913
sipa.codpersvinculados1008066
sipa.codpersvinculados99732
sipa.codpersvinculados10674
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
Effect of hydrogen addition on the deposition of titanium nitride thin films in nitrogen added argon magnetron plasma.pdf
Size:
3.1 KB
Format:
Adobe Portable Document Format
Description:
Download
Collections
Artículos de revistas