Reproducibility of a titanium plasma vacuum spark discharge

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dc.contributor.authorWyndham Hodder, Edmund Sydenham
dc.contributor.authorFavre Dominguez, Mario Benjamín
dc.contributor.authorChuaqui Kettlun, Hernan
dc.contributor.authorChoi, P.
dc.contributor.authorLeñero Marchanat, Ana María
dc.contributor.authorDiaz Poblete, Jorge Samuel
dc.date.accessioned2022-05-18T14:39:51Z
dc.date.available2022-05-18T14:39:51Z
dc.date.issued2005
dc.description.abstractThe results of an extensive operation of a vacuum spark plasma using Titanium electrodes in a 120-ns 150-kA discharge are presented. The hot spots are found to form with a regular spacing in a zippering Z-pinch plasma, which forms close to the cathode and extends to approximately two thirds of the anode separation over a period of a few nanoseconds. The axis of the discharge is well defined by an initial plasma from a Nd:YAG laser focussed onto the cathode electrode surface. The statistics of the formation of the hot spots are given for the life of one anode electrode. Between one and three hot spots form and the favored positions are at 1.5 and 3.0 mm from the cathode and the strongest emission, as observed in a filtered X-ray pinhole camera, comes from the hot spot closest to the cathode. The emission spectra resolved between 5 and 35 nm shows a wide range of Ti ionization which allows the temperatures of the anode blow off plasma, the Z-pinch and the hot spot plasma to be distinguished. These results are compared with filtered PIN diode signals and filtered pinhole images. The emission spectrum and the statistics of the axial localization of the hot spots are discussed in the context of potential applications to extreme-ultraviolet lithography.
dc.fuente.origenIEEE
dc.identifier.doi10.1109/TPS.2005.856513
dc.identifier.issn1939-9375
dc.identifier.urihttps://doi.org/10.1109/TPS.2005.856513
dc.identifier.urihttps://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=1518995
dc.identifier.urihttps://repositorio.uc.cl/handle/11534/64183
dc.information.autorucInstituto de física ; Wyndham Hodder, Edmund Sydenham ; S/I ; 100407
dc.information.autorucInstituto de física ; Favre Dominguez, Mario Benjamín ; S/I ; 99732
dc.information.autorucInstituto de física ; Chuaqui Kettlun, Hernan ; S/I ; 98761
dc.information.autorucInstituto de física ; Leñero Marchant, Ana María ; S/I ; 78434
dc.information.autorucInstituto de física ; Diaz Poblete, Jorge Samuel ; S/I ; 125403
dc.issue.numero5
dc.language.isoen
dc.nota.accesoContenido parcial
dc.pagina.final1667
dc.pagina.inicio1662
dc.revistaIEEE Transactions on Plasma Science
dc.rightsacceso restringido
dc.subjectReproducibility of results
dc.subjectTitanium
dc.subjectSparks
dc.subjectCathodes
dc.subjectElectrodes
dc.subjectAnodes
dc.subjectPlasma temperature
dc.subjectStatistics
dc.subjectPlasma applications
dc.subjectPlasma x-ray sources
dc.subject.ddc510
dc.subject.deweyMatemática física y químicaes_ES
dc.subject.otherEfecto Pinch (Física)
dc.subject.otherPlasmas producidos por láser
dc.subject.otherPlasma (Gases ionizados) - Diagnóstico
dc.titleReproducibility of a titanium plasma vacuum spark dischargees_ES
dc.typeartículo
dc.volumen33
sipa.codpersvinculados100407
sipa.codpersvinculados99732
sipa.codpersvinculados98761
sipa.codpersvinculados78434
sipa.codpersvinculados125403
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